Semiconductor Applications

In many purity-critical applications the potential for contamination created by contact of the process stream with sample transfer components such as tubing, fittings, and valves is a major concern. For example, the slightest contamination in gases used in manufacturing semi-conductor devices can create high failure rates in end products.

SilcolloyTM and SilcoGuardTM treatment can eliminate interactions between process gases and transfer system components. Our extensive evaluations in the fields of passivation, corrosion resistance, and ultra-high vacuum show that these treatments eliminate outgassing of impurities into the sample stream and will not react with process stream components.

SilcolloyTM treatment is compatible with many chemicals used in the semiconductor industry.

Click to View Chemicals

Chemical		Compatibility Rating
		Excellent	Good	Poor
2-Propanol	C3H8O	•
Acetic Acid	C2H4O2	•
Acetone	C3H6O	•
Ammonia	NH3		•
Ammonium Flouride	NH4F			•
Ammonium Hydroxide	NH4OH	•
Argon	Ar	•
Arsine	AsH3	•
Boron Tribromide	BBr3	•
Boron Trichloride	BCL3	•
Carbon Dioxide	CO2	•
Carbon Tetraflouride	CF4	•
Chlorine	CL	•
Dichloromethane (methylene chloride)	CH2CL2	•
Disilane	Si2H6	•
Helium	He	•
Hexafluoroethane	C2F6	•
Hexamethyldisilazane
HMDS	C6H19Si2N	•
Hydrochloric Acid	HCL	•
Hydrofluoric Acid	HF			•
Hydrogen	H2	•
Hydrogen Bromide	HBr		•
Hydrogen Peroxide	H2O2		•
Methanol	CH3OH	•
Nitric Acid	HNO3	•
Nitrogen	N2	•
Nitrogen Trifluoride	NF3		•
n-Methyl 2-Pyrrolidone	C5H9NO	•
Octafluorocyclobutane	C4F8	•
Oxygen	O2	•
Ozone	O3	•
Phosphine	PH3	•
Phosphoric Acid	H3PO4	•
Phosphoric Oxychloride	POCL3		•
Potassium Hydroxide	KOH			•
Silane	SiH4	•
Sulfur Hexafluoride	SF6		•
Sulfuric Acid	H2SO4			•
Tungsten Hexaflouride	WF6		•
Water	H2O	•
DI Water	H20		•

SilcoTek Surface Treatments
SilcoTek passivation and surface protection layers are deposited using a chemical vapor deposition (CVD) process in which the item to be treated is heated under vacuum. Our current capacity enables us to treat items up to 6 feet long, or continuous lengths of coiled tubing exceeding 2000 feet (600 meters). Items that can be evacuated, such as gas chambers, can have a volume of up to 43 cubic feet.

When the item has been heated to the appropriate temperature, the reacting gases that form the protective surface are introduced, depositing a durable, amorphous silicon layer that grows and overlays itself multiple times. The reaction layer penetrates into the lattice of the treated piece and binds solidly. Consequently, it is possible to work a piece, such as bending a length of treated tubing, without creating cracks, flakes, or other flaws in the layer. By controlling the variables in the process, we control the layer type and thickness. Layer thickness ranges from 0.03µm to 5µm, controlled to our specifications.

SilcoTek’s surface treatments are:

SilcoNert™ 1000 (Silcosteel®)
A general-purpose passivation layer for steel and stainless steel. U.S. patent 6,511,760.

SilcoNert™ 2000 (Siltek®/Sulfinert®)
The ultimate passivation of treated surfaces, from glass to high nickel alloys of steel. A required treatment for metal components when analyzing for parts-per-billion levels of organo-sulfur compounds & mercury. U.S. patent 6,444,326.

Silcolloy™ 1000 (Silcosteel®-CR)
A corrosion resistant layer that increases the lifetime of system components in acidic environments containing hydrochloric acid, nitric acid, or seawater. U.S. patent 7070833.

SilcoKlean™ 1000 (Silcosteel®-AC)
Dramatically reduces carbon buildup on stainless steel components. U.S. patent 6,444,326.

SilcoGuard™ 1000(Silcosteel®-UHV)
Greatly reduces outgassing from components of ultra-high vacuum systems. U.S. patent 7070833.

All coatings are applied to customer supplied items on a custom basis—see Custom Coating Services. To request a quote, click here.