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Improve Corrosion Resistance and System Purity With New Dursan® |
Next generation semiconductor technology will cost an estimated $10 billion per wafer fab facility. Maximizing yields and process efficiency will be even more essential to not only optimizing profit but ensuring the health of the company. Factors to consider when optimizing process yield and efficiency:
SilcoTek's new semicon modified Dursan® coating improves new fab facility performance 4 ways:
Dursan's unique non line-of-sight CVD coating technology is ideal for coating complex geometries commonly found in semiconductor fab equipment. Dursan bonds to stainless steel, essentially making the stainless steel surface high purity silicon. Dursan allows the manufacturer the flexibility and ease of manufacturing components in stainless steel while benefiting from the inertness, purity, corrosion resistance and wear resistance of silicon.
Coat the entire flow path to maximize yield: