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Corrosion Resistant Dursox, The Power Behind Improved Semicon Yield

showerhead_2_2_19_16.jpg

Semiconductor manufacturers have found a new weapon in the struggle for improved yields, higher purity, and reduced cost.  Corrosives commonly used in semiconductor manufacturing cause yield robbing ion contamination; resulting in wafer contamination, higher maintenance and increased burn-in time. 

Dursox™ is a thin but durable silicon oxide (SiO) high purity barrier coating that prevents semiconductor tool corrosion and erosion.  Our patented CVD process bonds Dursox to stainless steel and ceramic surfaces.  The micro-thin coating penetrates small holes, inner cavities, and narrow bore tubes without significant change in component tolerance. 

Find Out More About SilcoTek  Semiconductor Solutions

Watch our corrosion video and see how our coatings prevent corrosive attack.

Dursox™­ offers significant corrosion resistance when applied to stainless steel and other alloys; preventing contamination and extending component life.  See our semiconductor chemical compatibility list.

 

Dursox_corrosion_comparison_5_28_15

 

Dursox™ is a high purity silicon oxide layer that contains no metals, assuring no leaching of metal ions into process streams.  XPS data show Dursox contains only silicon, oxygen and carbon, making it the ideal barrier coating for semiconductor manufacturing applications.

DursoxXPSData-800936-edited.jpg

Dursox™ is made for next generation semiconductor manufacturing systems.

Etch Dursox high purity coating eliminates ion contamination in corrosive etch gas streams.
Atomic Layer Deposition (ALD) Dursox enhances purity by coating of all chambers and equipment. Reduces carryover and corrosion.
Ozone Stabilize flow path to assure ozone purity.
Gas Transfer Prevent ion contamination, assure high purity gases.
Chemical-Mechanical Planarization (CMP) Increase lubricity, prevent sticking and cut downtime.
Epitaxy Dursox significantly reduces contamination and maintenance caused by corrosion.

 

Dursox can be applied to most semiconductor tool components, including:

  • Showerheads
  • Supply tubes
  • Fittings
  • Regulators
  • Reactors
Semiconductor_image.jpg

Learn more about Dursox™ and SilcoTek® coatings for semiconductor applications.

Watch Our Semicon  Coatings Webinar

 
Posted by Marty Higgins

Topics: Semiconductor, Purity, Corrosion

Recommended Reading

How To Make Precision Instruments Corrosion Resistant and Metal Free 

Solving Corrosion Problems in Stack and Flare Monitoring Systems

Solving Corrosion Problems in Stack, Flare, and Gas Abatement Systems

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