SilcoGuard

A High Purity Low Outgassing Coating 

What Is SilcoGuard?

SilcoGuard® is a high purity silicon barrier coating designed to minimize vacuum system outgassing and contamination in ultra high vacuum chambers and semiconductor process flow paths.  SilcoGuard is bonded to stainless steel, alloy, glass, and ceramic surfaces by SilcoTek's patented chemical vapor deposition process.  The SilcoGuard high purity moisture repelling surface acts as a barrier, isolating any impurities trapped on or in the surface while minimizing outgassing and process contamination in UHV environments.  

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Applications 

SemiConductor

Semiconductor

Applying SilcoGuard to the internal surfaces of vacuum systems can dramatically reduce outgassing rates and improve productivity of process chambers.

Microscope

Research

SilcoGuard treated vacuum chamber surfaces achieve a lower base pressure significantly faster than uncoated surfaces; saving time, improving productivity and reducing process cost.

vessel

Vacuum Processing

Coated UHV surfaces improve system productivity while preventing contamination from stainless steel flow paths.  

 

 

SilcoGuard coated flange

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Coating Benefits for Vacuum Process Applications

  • Significantly reduce pump down time

  • Reduce moisture contamination and outgassing

  • Barrier coating prevents surface contamination

  • Improve product yield and test purity
  • Improve productivity 

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SilcoGuard® is a non reactive high temperature CVD coating 

The SilcoGuard coating technology maximizes the performance of UHV systems.  Comparative studies show SilcoGuard reduces pump down time by up to 3X or more.  Coated UHV surfaces improve system productivity while preventing contamination from stainless steel flow paths.  SilcoGuard significantly improves moisture management in semiconductor, analytical and UHV systems.  

Not sure if SilcoGuard is right for your application?  Go to our Coating Comparison Guide or contact our Technical Service Team.   

Learn More About SilcoTek.  Watch Our Process Video