SilcoTek Coating Blog

How to improve vacuum performance in UHV, semiconductor systems

Written by Marty Higgins | July 26 2013

 

SilcoTek coatings improve vacuum performance in UHV and semiconductor systems by reducing outgassing and preventing ion contaminantion and corrosion. 

SilcoGuard 1000 is a silicon coating proven to reduce outgassing by 8x or more.  SilcoGuard 1000 is a high tolerance coating that does not interfere with conflat surfaces.  A recent report by Kurt Lesker Inc. notes several ways to improve vacuum performance.  Click Here to see the report.

Ion contamination resulting from corrosion is also a concern for vacuum and semiconductor professionals.  Silcolloy 1000 and Dursan coatings are designed to reduce corrsoion 10x or more while reducing burn-in or seasoning time in semiconductor etching and other tools.  Click Here to learn more.