| We put Dursan on an oxygen diet. The result? Dursox, a new high purity, corrosion resistant barrier coating for semiconductor manufacturing applications. |
Dursox™ is a thin but durable silicon oxide (SiO) high purity barrier coating that prevents semiconductor tool corrosion and errosion. Dursox™ offers significant resistance to corrosives common in semiconductor manufacturing.
Dursox is a high purity silicon oxide layer that contains no metals, assuring no leaching of metal ions into process streams; making it an ideal semiconductor coating. XPS data show Dursox contains no metals throughout the layer.