---
title: Semiconductor Tool Corrosion?  New Dursox Coating Solves Your Problem!
description: New Dursox is a high purity corrosion resistant barrier coating for semiconductor and instrumentation applications.
---

[SilcoTek Coating Blog ](https://www.silcotek.com/blog)

# [Semiconductor Tool Corrosion? New Dursox Coating Solves Your Problem!](https://www.silcotek.com/blog/got-corrosion-high-purity-barrier-coating-solves-your-problem)

 Written by [Marty Higgins](https://www.silcotek.com/blog/author/marty-higgins) | March 13 2015

|  | We put [Dursan](https://www.silcotek.com/dursan) on an oxygen diet.  The result?  Dursox, a new high purity, corrosion resistant barrier coating for semiconductor manufacturing applications. |
| --- | --- |

Dursox™ is a thin but durable silicon oxide (SiO) high purity barrier coating that prevents semiconductor tool corrosion and errosion.  Dursox™­ offers significant resistance to[ corrosives](https://www.silcotek.com/semiconductor-chemical-compatibility) [common in semiconductor manufacturing](https://www.silcotek.com/semiconductor-chemical-compatibility).

## Ultimate Purity

Dursox is a high purity silicon oxide layer that contains no metals, assuring no leaching of metal ions into process streams; making it an ideal semiconductor coating.  XPS data show Dursox contains no metals throughout the layer.

## Dursox™ is made for next generation semiconductor manufacturing systems

- Etch: 
    - Dursox high purity coating eliminates ion contamination in corrosive etch gas streams
- Atomic Layer Deposition (ALD): 
    - Dursox enhances purity by coating of all chambers and equipment. Reduces carryover and corrosion
- Epitaxy: 
    - Dursox significantly reduces contamination and maintenance caused by corrosion
- Ozone:   
    - Stabilize flow path to assure ozone purity
- Gas Transfer: 
    - Prevent ion contamination, assure high purity gases
- Chemical-Mechanical Planarization (CMP): 
    - Increase lubricity, prevent sticking and cut downtime

 

[View full post](https://www.silcotek.com/blog/got-corrosion-high-purity-barrier-coating-solves-your-problem)

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