We put Dursan on an oxygen diet.  The result?  Dursox, a new high purity, corrosion resistant barrier coating for semiconductor manufacturing applications.

Dursox™ is a thin but durable silicon oxide (SiO) high purity barrier coating that prevents semiconductor tool corrosion and errosion.  Dursox™­ offers significant resistance to corrosives common in semiconductor manufacturing.

Ultimate Purity

Dursox is a high purity silicon oxide layer that contains no metals, assuring no leaching of metal ions into process streams; making it an ideal semiconductor coating.  XPS data show Dursox contains no metals throughout the layer.

Dursox™ is made for next generation semiconductor manufacturing systems

• Etch:
  • Dursox high purity coating eliminates ion contamination in corrosive etch gas streams
• Atomic Layer Deposition (ALD):
  • Dursox enhances purity by coating of all chambers and equipment. Reduces carryover and corrosion
• Epitaxy:
  • Dursox significantly reduces contamination and maintenance caused by corrosion
• Ozone:
  
  • Stabilize flow path to assure ozone purity
• Gas Transfer:
  • Prevent ion contamination, assure high purity gases
• Chemical-Mechanical Planarization (CMP):
  • Increase lubricity, prevent sticking and cut downtime