Semiconductor Tool Corrosion? New Dursox Coating Solves Your Problem!

March 13 2015 Semiconductor

We put Dursan on an oxygen diet. The result? Dursox, a new high purity, corrosion resistant barrier coating for semiconductor manufacturing applications.

Dursox™ is a thin but durable silicon oxide (SiO) high purity barrier coating that prevents semiconductor tool corrosion and errosion. Dursox™ offers significant resistance to corrosives common in semiconductor manufacturing.

Ultimate Purity

Dursox is a high purity silicon oxide layer that contains no metals, assuring no leaching of metal ions into process streams; making it an ideal semiconductor coating. XPS data show Dursox contains no metals throughout the layer.

DursoxXPSData

Dursox™ is made for next generation semiconductor manufacturing systems

Etch:
- Dursox high purity coating eliminates ion contamination in corrosive etch gas streams
Atomic Layer Deposition (ALD):
- Dursox enhances purity by coating of all chambers and equipment. Reduces carryover and corrosion
Epitaxy:
- Dursox significantly reduces contamination and maintenance caused by corrosion
Ozone:
- Stabilize flow path to assure ozone purity
Gas Transfer:
- Prevent ion contamination, assure high purity gases
Chemical-Mechanical Planarization (CMP):
- Increase lubricity, prevent sticking and cut downtime

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Semiconductor Tool Corrosion? New Dursox Coating Solves Your Problem!

Ultimate Purity

Dursox™ is made for next generation semiconductor manufacturing systems

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