Semiconductor Tool Corrosion? New Dursox Coating Solves Your Problem!

March 13 2015 Semiconductor

We put Dursan on an oxygen diet. The result? Dursox, a new high purity, corrosion resistant barrier coating for semiconductor manufacturing applications.

Dursox™ is a thin but durable silicon oxide (SiO) high purity barrier coating that prevents semiconductor tool corrosion and errosion. Dursox™ offers significant resistance to corrosives common in semiconductor manufacturing.

Ultimate Purity

Dursox is a high purity silicon oxide layer that contains no metals, assuring no leaching of metal ions into process streams; making it an ideal semiconductor coating. XPS data show Dursox contains no metals throughout the layer.

DursoxXPSData

Dursox™ is made for next generation semiconductor manufacturing systems

Etch:
- Dursox high purity coating eliminates ion contamination in corrosive etch gas streams
Atomic Layer Deposition (ALD):
- Dursox enhances purity by coating of all chambers and equipment. Reduces carryover and corrosion
Epitaxy:
- Dursox significantly reduces contamination and maintenance caused by corrosion
Ozone:
- Stabilize flow path to assure ozone purity
Gas Transfer:
- Prevent ion contamination, assure high purity gases
Chemical-Mechanical Planarization (CMP):
- Increase lubricity, prevent sticking and cut downtime

Our Coatings

Our Services

By Solution

By Industry

Resources

Latest News

Company

Careers

Contact

Address

Semiconductor Tool Corrosion? New Dursox Coating Solves Your Problem!

Ultimate Purity

Dursox™ is made for next generation semiconductor manufacturing systems

Related Resources

What can we help you with?

Quick Links

Contact

Subscribe to Email Updates