Next Generation Coating Solutions for the Semiconductor Industry

Silcolloy and Dursan coating solutions for semiconductor corrosion resistance and purity

Semiconductor manufacturing processes utilize highly corrosive gases that damage process equipment and threaten high purity that is demanded by the industry.  While it's important to protect this equipment from these harmful effects, very few options are both pure and strong enough to offer a comprehensive solution.  SilcoTek’s patented chemical vapor deposition (CVD) silicon coatings bond to the base substrate producing a high purity, corrosion resistant, and flexible surface.  Silcolloy® is ideal for semiconductor and PV applications:

  • High purity silicon eliminates base metal contamination

  • SilcoTek’s CVD process coats intricate surfaces and can penetrate the smallest holes

  • SilcoTek® coatings deform with tubing or process surfaces allowing radius bends and leak free seals.

Many 316L gas delivery systems exposed to corrosive environments are replaced within 5 years of installation.  Silcolloy extends the life of stainless steel manufacturing components by preventing corrosion from hydrogren bromine and other harsh process gases.    

 

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Silcolloy improves HBr corrosion resistance by 7x or more

 

Immersion of Silcolloy (silicon) coated 316 stainless steel coupons in 6N hydrochloric acid shows significant improvement in corrosion resistance compared to uncoated 316 stainless steel.  Significant corrosion protection, high purity, and reduced costs make Silcolloy a common choice for semiconductor manufacturers.

 

Silcolloy improves corrosion resistance

SilcoTek's semiconductor R&D team has recently developed a modification to our Dursan® coating that is tailored specifically to semiconductor manufacturers.  The carbon element of the original Dursan is almost fully removed, yielding a thin but durable silicon oxide (SiO) layer that prevents both erosion and corrosion in manufacturing processes.

  • Insulative and chemically stable, minimizing loss

  • Highly resistant to ozone

  • Uniform, thin CVD layer for maximum performance

Why SilcoTek®?

SilcoTek helps semiconductor manufacturers meet cost and productivity requirements by improving the surface performance of stainless steel:

• Eliminate process variables caused by corrosion
• Save money via reduced downtime and maintenance
• Enhance yield and throughput

Our process is easy: send an email to SilcoD@SilcoTek.com or click here with details of the components that require treatment.  We will evaluate your information and work closely with you to find the ideal solution.  Then, simply send us your parts and we will return them cleaned, coated and ready to perform at a higher standard.