The semiconductor industry has become increasingly reliant on advanced materials in device manufacturing both for the devices themselves and the equipment used to produce them. Protecting the process from the environment has been a given, but the risk of contamination to today's nano-devices has required protection from the tools used in fabrication process. To address these challenges, new materials and coatings, such as Siltride®, Dursan® and Silcolloy® technologies, have proven invaluable. By both controlling contamination and reducing expensive tool cost-of-ownership, coatings have become essential in both state-of-the-art processing as well as legacy device manufacturing. Here are a couple of the compelling areas where they have changed the game:
In semiconductor manufacturing, harsh chemicals and gases are often used in processes such as etching and deposition. These chemicals can lead to corrosion, which compromises the integrity and performance of critical tools. SilcoTek’s Dursan and Silcolloy coatings significantly improve corrosion resistance, ensuring that components last longer even in aggressive chemical environments. This leads to reduced maintenance and replacement costs, which is vital in an industry where downtime can be very costly. SilcoTek worked with Samsung on a case study to determine if our Siltride coating could help to reduce corrosion and save replacement costs. Below are the mass loss results when comparing an uncoated control and a Siltride-coated quenching sleeve. The coated sleeve experienced no mass loss, while the uncoated sleeve lost 18% of its mass after 70 days in operation. Check out the whole case study here.
Contamination control is a significant concern in semiconductor fabs. Unwanted materials or particles can affect the quality of the end product, causing defects or yield loss. SilcoTek’s coatings provide a barrier that prevents the leaching of metals or other contaminants from process tools into wafers. For example, SilcoNert coatings are specifically designed to reduce metal ion leaching, which can lead to particle generation and contamination during sensitive manufacturing steps.
Vacuum systems are critical in semiconductor manufacturing, and achieving efficient pumpdown cycles can save time and energy. SilcoTek coatings have been shown to improve vacuum performance by reducing outgassing and enhancing surface cleanliness. This results in faster pumpdown cycles and increased tool uptime.
As semiconductor processes evolve, with new materials and more complex geometries, the need for advanced coatings becomes even more pronounced. SilcoTek continues to innovate with solutions like Siltride, a silicon oxynitride coating that offers superior wear resistance and electrical resistivity. This is particularly relevant as new technologies emerge in the industry, such as quantum computing and next-gen chips.
Corrosion in semiconductor process flow paths can result in yield robbing particulates and metal ion release. SilcoTek corrosion resistant barrier coatings can be bonded to the most intricate internal flow path surfaces to dramatically improve the corrosion resistance and inertness of stainless steel and metal alloy surfaces.
Applications include:
SilcoTek’s advanced coatings are helping semiconductor fabs optimize performance, reduce contamination, and improve durability, all while keeping costs down. As the industry continues to grow and evolve, innovative coating solutions like those provided by SilcoTek will play an even more critical role in shaping its future.
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