The Corrosion Resistant Silicon Oxide Barrier Coating

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About Dursox®

Dursox is a thin but durable silicon oxide (SiO) high purity barrier coating that prevents semiconductor tool corrosion and erosion.  Our patented CVD process bonds super high purity silicon to stainless steel, alloy, glass, and ceramic surfaces.  The micro-thin coating penetrates small holes, inner cavities, and narrow bore tubes without significant change in component tolerance. Dursox will deform with part surfaces, allowing a leak-free seal or radius bend while maintaining high dimensional tolerance.    

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Applications

Semiconductor manufacturers have found a new weapon in the struggle for improved yields, higher purity, and reduced cost.  Corrosives commonly used in semiconductor manufacturing cause yield robbing ion contamination, resulting in wafer contamination, higher maintenance and increased burn-in time. 

Dursox® is the ideal coating wherever a high purity, durable, corrosion resistant coating is needed, applications range from semiconductor manufacturing, to research, and instrumentation corrosion.  Corrosives commonly used in semiconductor manufacturing cause yield robbing ion contamination, resulting in wafer contamination, higher maintenance and increased burn-in time.  Our CVD coating protects parts from corrosive attack while making the surface non reactive and contaminant free, improving yield, eliminating process contamination and reducing tool burn-in.

Click the icon below to view application:

      Corrosion   Research  Semiconductor
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Benefits

Dursox® makes semiconductor manufacturing flowpaths and critical surfaces non reactive and corrosion resistant, preventing process contamination and improving yield.  Our product is superior to ceramic coatings like yttria, offering better stability, no delamination, and improved durability even in high stress areas like conflat sealing surfaces.  

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Etch High purity coating eliminates ion contamination in corrosive etch gas streams.
Atomic Layer Deposition (ALD)        Enhance purity by coating of all chambers and equipment. Reduces carryover, burn-in, and corrosion.
Ozone Stabilize flow path to assure ozone purity.
Gas Transfer Prevent ion contamination, assure high purity gases.
Chemical-Mechanical Planarization (CMP) Increase lubricity, prevent sticking and cut downtime.
Epitaxy Significantly reduces contamination and maintenance caused by corrosion.
 

Dursox® is a high purity silicon oxide layer that contains no metals, assuring no leaching of metal ions into process streams.  XPS data show our CVD coating contains only silicon, oxygen and carbon, making it the ideal barrier coating for semiconductor manufacturing applications.

 Dursox XPS Data 6 11 18

Our coatings offer significant corrosion resistance when applied to stainless steel and other alloys, preventing contamination and extending component life.  See our semiconductor chemical compatibility list.

 

Dursox corrosion comparison 2 6 11 18

 

Watch our corrosion video and see how our coatings prevent corrosive attack.

 

Our coatings can be applied to most semiconductor tool components, including:

  • Showerheads
  • Supply tubes
  • Fittings
  • Regulators
  • Reactors
  • Fittings & valves
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Learn more about SilcoTek® coatings for semiconductor applications.

  

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