High purity coating eliminates ion contamination in corrosive etch gas streams.
Enhance purity by coating of all chambers and equipment. Reduces carryover, burn-in, and corrosion.
Stabilize flow path to assure ozone purity.
Reduce contamination and maintenance caused by corrosion.
Data
Comparative corrosion testing shows that Dursox improves corrosion resistance by an order of magnitude when compared to uncoated stainless steel. ASTM G31 72 hour immersion in 6m hydrochloric acid (below) tells the story. Thick or thin coating of Dursox will improve corrosion resistance by 10x.
If you have a technical question about how our coating technologies will perform in your application, contact our Technical Service Team and ask the experts.
If you would like to buy a coated product directly from the manufacturer, go to our Buy Coated Products page.
To get the most out of your process flow path and instrumentation coat all flow path components and systems in a variety of semiconductor applications. This includes:
| Etch | High purity coating eliminates ion contamination in corrosive etch gas streams. |
| Atomic Layer Deposition (ALD) | Enhance purity by coating of all chambers and equipment. Reduces carryover, burn-in, and corrosion. |
| Ozone | Stabilize flow path to assure ozone purity. |
| Gas Transfer | Prevent ion contamination, assure high purity gases. |
| Chemical-Mechanical Planarization (CMP) | Increase lubricity, prevent sticking and cut downtime. |
| Epitaxy | Significantly reduces contamination and maintenance caused by corrosion. |
Coat any critical flow path component, including:
Want to test our coating before you buy? Get a free test coupon or arrange for a free test evaluation. 
Dursox® is a non reactive high temperature corrosion resistant coating
Dursox® is a high purity silicon oxide layer that contains no metals, assuring no leaching of metal ions into process streams. X-ray photoelectron spectroscop (XPS) data (below) show our CVD coating contains only silicon, oxygen and carbon, making it the ideal barrier coating for semiconductor manufacturing applications or wherever high purity corrosion resistance is needed.
Not sure if Dursox is right for your application? Go to our Coating Comparison Guide or contact our Technical Service Team.
