Dursox

A High Purity Corrosion Resistant Silicon Oxide Coating

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What Is Dursox?

Dursox® is a thin but durable silicon oxide (SiO) high purity barrier coating that prevents semiconductor tool corrosion and erosion.  Our patented CVD process bonds super high purity silicon to stainless steel, alloy, glass, and ceramic surfaces.  The micro-thin coating penetrates small holes, inner cavities, and narrow bore tubes without significant change in component tolerance. Dursox will deform with part surfaces, allowing a leak-free seal or radius bend while maintaining high dimensional tolerance. 

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Dursox-logo registered TM

Coating Benefits for Semiconductor and Research Applications

  • High purity coating eliminates ion contamination in corrosive etch gas streams.

  • Enhance purity by coating of all chambers and equipment. Reduces carryover, burn-in, and corrosion.

  • Stabilize flow path to assure ozone purity.

  • Prevent ion contamination, assure high purity gases.
  • Reduce contamination and maintenance caused by corrosion. 

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Data 

Comparative corrosion testing shows that Dursox improves corrosion resistance by an order of magnitude when compared to uncoated stainless steel.  ASTM G31 72 hour immersion in 6m hydrochloric acid (below) tells the story.  Thick or thin coating of Dursox will improve corrosion resistance by 10x.

Dursox immersion corrosion comparison 2

If you have a technical question about how our coating technologies will perform in your application, contact our Technical Service Team and ask the experts.

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If you would like to buy a coated product directly from the manufacturer, go to our Buy Coated Products page.

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To get the most out of your process flow path and instrumentation coat all flow path components and systems in a variety of semiconductor applications.  This includes:

Etch High purity coating eliminates ion contamination in corrosive etch gas streams.
Atomic Layer Deposition (ALD)        Enhance purity by coating of all chambers and equipment. Reduces carryover, burn-in, and corrosion.
Ozone Stabilize flow path to assure ozone purity.
Gas Transfer Prevent ion contamination, assure high purity gases.
Chemical-Mechanical Planarization (CMP) Increase lubricity, prevent sticking and cut downtime.
Epitaxy Significantly reduces contamination and maintenance caused by corrosion.

 

Coat any critical flow path component, including:

  • Sensors, and detectors
  • Showerheads
  • Heat exchangers
  • Instrumentation flow paths
  • Calibration flow paths
  • Regulators
  • Tubing
  • Valves and fittings
  • Separators and filters
  • Reactors, tanks, and canisters

Get A Coating  Quote Want to test our coating before you buy?  Get a free test coupon or arrange for a free test evaluation.  Get Free Samples

 

 

  

Learn More About SilcoTek.  Watch Our Process Video