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Dursox® Coating 

High Purity Silicon Oxide Coating

What is Dursox®?

Dursox® is a thin but durable silicon oxide (SiO) high purity barrier coating process that prevents tool corrosion and erosion. Our patented CVD process bonds super high purity silicon to stainless steel, alloy, glass, and ceramic surfaces. The micro-thin coating penetrates small holes, inner cavities, and narrow bore tubes without significant change in component tolerance. Dursox will deform with part surfaces, allowing a leak-free seal or radius bend while maintaining high dimensional tolerance. 

 

 

 

How is Dursox Applied to Your Parts?

Like all SilcoTek coatings, Dursox surfaces are applied using SilcoTek’s proprietary chemical vapor deposition (CVD) technology. Unlike typical liquid spray or dip coating methods, CVD is a completely non-line-of-sight process that uses gases at high temperatures to produce ultra-thin coatings which bond molecularly to the part substrate, creating superior adhesion compared to any other coating. This also means that even sub-micron sized openings, sharp edges, flexible components like bellows, and high aspect ratio flow paths are completely coated without requiring design changes. 


Want to know if Dursox is right for your application? Contact our Technical Service Team.

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Applications & Benefits

Group 30598

semiconductor

Reduce corrosion and prevent metal ion contamination from processing equipment. 

Commonly coated parts:

  • Liquid precursor canisters 
  • Gas delivery tubing 
  • Valves and fittings 
  • Chambers 
Group 30622

research

Deposit a known silicon oxide surface on metal parts to control their surface properties. 

Commonly coated parts:

  • Vessels and reactors 
  • Tubing and piping 
  • Custom parts 
corrosion

General industry

Our silicon oxide Dursox surface improves corrosion resistance and barrier properties on any component. 

Commonly coated parts:

  • Chemical process componentry 
  • Complex shapes and high aspect ratios 
  • Long lengths of coiled and straight tubing 
  • Many more 

Don’t see your application?

We assign an expert team to every customer project and sometimes customize standard coatings to meet unique needs.

Contact our coating experts to discuss your requirements and try our coatings at little or no cost to you.

Dursox in Scientific Publications

 

 
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Dursox® Coated Product Examples

Circle Plate

Dursox-coated Plate

Circle Swagelok Fittings

Dursox-coated Fittings

Dursan-flanges-1

Dursox-coated Flange

Related Resources

Data Sheets and Brochures

Dursox® Data Sheet

Technical Publications

Coating Electropolished Surfaces

Technical Publications

Mechanical testing of Coated, Uncoated, and Thermal Treated 316 SS

Videos and Webinars

A SilcoTek Webinar: CVD Coatings for Semiconductor Fabrication

Data Sheets and Brochures

Chemical Compatibility

Quick Links

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814-353-1778
Service@SilcoTek.com

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