SilcoTek's inert, precision CVD silicon barrier coatings protect and improve critical surfaces throughout semiconductor process systems. Coating all critical flow path surfaces will prevent ion and particulate contamination & improve process yield. SilcoTek® coatings like Silcolloy®, Dursox® and Dursan® make critical flow paths corrosion resistant and inert, assuring process components are protected and free from yield-robbing metal ion contamination.
The benefits of an inert and corrosion resistant barrier coating include:
Corrosion in semiconductor process flow paths can result in yield robbing particulates and metal ion release. SilcoTek corrosion resistant barrier coatings can be bonded to the most intricate internal flow path surfaces to dramatically improve the corrosion resistance and inertness of stainless steel and metal alloy surfaces.
To get the most out of your process and product, coat all flow path components and systems. This includes:
Calibration and spec gas delivery systems
Process Flow Paths