Coating Applications for Semiconductor Manufacturing

Improve Corrosion Resistance, Purity, and Yield  

Get the Material Performance You Need to Build Quality Into Your Process 

SilcoTek high tolerance, precision CVD silicon barrier coatings protect and improve critical surfaces throughout semiconductor process systems.  Coating all critical flow path surfaces will prevent ion and particulate contamination & improve process yield.  SilcoTek® coatings like Silcolloy®, Dursox® and Dursan® make critical flow paths corrosion resistant and inert, assuring process components are protected and free from yield robbing metal ion contamination. 

The benefits of an inert and corrosion resistant barrier coating include:                                                                                 

  • Improved corrosion resistance with less process contamination                                                                              
  • Low outgassing for improved vacuum pump down.                                                                             
  • Less metal ion contamination and particulate generation, less fluid contamination for improved yield                                                                           
  • Improved durability and reliability for longer component life
                                                                 
  • Consistent performance for improved regulatory compliance

 

Get all the information about the benefits of SilcoTek coated analytical flow paths.

 

Get Our Semiconductor Application Guide

UHV-vacuum-reactor

Coating Applications for Semiconductor Manufacturing.

Corrosion in semiconductor process flow paths can result in yield robbing particulates and metal ion release.  SilcoTek corrosion resistant barrier coatings can be bonded to the most intricate internal flow path surfaces to dramatically improve the corrosion resistance and inertness of stainless steel and metal alloy surfaces. Applications include:

 
  •   Cleanroom VOC Testing
  •   Product and SEM Testing
  •   Process Gas Delivery 
  •   Corrosion Control
  •   Etch and deposition
    • Etch:  Eliminate barrier contamination, increase life, eliminate burn-in
    • ALD:  Enhance purity, reduce carryover and corrosion
    • EPI:  Eliminate particulate generation, improve stainless steel corrosion resistance
    • OLED:  Improve yield and efficiency
    • Ozone:  Stable flow path
Dursan_flanges-

 

 

 

Semiconductor Application Data

Need an inert surface that's durable and corrosion resistant?  Dursan offers superior performance and durability, making it an ideal coating for sampling in challenging environments.

Corrosion Dursan ASTMG31

Common semicon chemicals like HBr can corrode process systems, Silcolloy®, our corrosion resistant CVD coating, can improve system corrosion resistance 3x or more.  

ASTM G31 Silcolloy  6N HBr 1

SilcoTek high tolerance, precision CVD silicon coatings protect and improve critical surfaces throughout semiconductor process systems.  Coating all critical flow path surfaces will prevent ion and particulate contamination & improve process yield.  Coat the entire flow path to assure maximum performance.

 

The uncoated tubing (below left "A") retains methanol, resulting in unreliable and slow calibration and testing.  The SilcoNert coated tubing (right "B") retains very little methanol, resulting in fast response and accurate test results.  This enables cleanroom and other indoor or outdoor monitoring stations to provide consistent and precise results. 

 

Methanol adsorption VOC Analysis

SilcoTek® inert barrier coatings dramatically reduce outgassing of stainless steel surfaces, improving pumpdown efficiency and virtually eliminating surface burn-in requirements.  Coated vacuum and critical flow path surfaces improve process efficiency and productivity.

Chamber Pump down

Moisture and other contaminants don't stick to SilcoTek® coatings, improving SEM pumpdown and preventing product adulteration.

Moisture Adsorption

Resources

 

 Watch our corrosion resistance demonstration video to see how our coating technology improves performance.

 

Protect your Equipment from Corrosion - Dursan from SilcoTek

If you have a technical question about how our coating technologies will perform in your application, contact our Technical Service Team and ask the experts.

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If you would like to buy a coated product directly from the manufacturer, go to our Buy Coated Products page.

Buy Coated Products

 

 

To get the most out of your process and product, coat all flow path components and systems.  This includes:

Calibration and spec gas delivery systems

  • Gas regulators
  • Tubing
  • Valves

Process Flow Paths

  • Showerheads
  • Canisters and tanks
  • UHV reactors including conflat flange surfaces
  • Gas delivery systems
  • Separators and filters
  • Regulators and mass flow control
  • Tubing, valves and fittings
  • Probes and sample flow paths
  • Heat exchangers and reactors
  • Flow control 

  

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