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Coatings for Semiconductor Manufacturing

Improve Corrosion Resistance, Purity, and Yield

Increase Return on Investment on Critical Manufacturing and Process Equipment

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SilcoTek's inert, precision CVD silicon barrier coatings protect and improve critical surfaces throughout semiconductor process systems. Coating all critical flow path surfaces will prevent ion and particulate contamination & improve process yield. SilcoTek® coatings like Silcolloy®, Dursox® and Dursan® make critical flow paths corrosion resistant and inert, assuring process components are protected and free from yield-robbing metal ion contamination.

The benefits of an inert and corrosion resistant barrier coating include:

  • Improve corrosion resistance with less process contamination
  • Increase chemical resistance and metal barrier properties in UHV systems while simultaneously improving vacuum performance
  • Improve yields with less metal ion leaching, fluid contamination, and particulate generation
  • Enhance durability and reliability for longer component life
  • Consistent performance improves process control

Coating Applications for Semiconductor Manufacturing.

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Corrosion in semiconductor process flow paths can result in yield robbing particulates and metal ion release. SilcoTek corrosion resistant barrier coatings can be bonded to the most intricate internal flow path surfaces to dramatically improve the corrosion resistance and inertness of stainless steel and metal alloy surfaces.

Applications include:

  • Cleanroom VOC Testing
  • Product and SEM Testing
  • Process Gas Delivery
  • Corrosion Control
  • Etch and deposition

Coating Services

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To get the most out of your process and product, coat all flow path components and systems. This includes:

Calibration and spec gas delivery systems

  • Gas regulators
  • Tubing
  • Valves

Process Flow Paths

  • Showerheads
  • Canisters and tanks
  • UHV reactors including conflat flange surfaces
  • Gas delivery systems
  • Separators and filters
  • Regulators and mass flow control
  • Tubing, valves and fittings
  • Probes and sample flow paths
  • Heat exchangers and reactors
  • Flow control

Most Recommended Coatings

Silcolloy® 2000

Greater than 99.9% pure amorphous silicon coating ideal for use as a barrier coating in corrosive environments upstream from the wafer processing chamber. Learn more.

Dursan®

Functionalized, hydrophobic silicon oxide coating used to control corrosion from hydrochloric acid. Highly effective solution for eliminating moisture in metal halide use applications such as atomic layer deposition and silicon epitaxy. Useful in all non-plasma areas – precursor storage, gas delivery, and gas exhaust. Learn more.

Siltride® 1000

Thermally stable silicon oxy-nitride coating offering non-plasma fluorine resistance in some of the harshest environments. Siltride® 1000 has been used by leading fabs to reduce downtime and the cost of ownership in their sub-fab. Learn more.

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Additional Resources

Technical Publications

Specialty Coatings to Reduce Corrosion in Scrubber Components

Coating for Corrosion & Metal Ion Contamination (ASMC 2017 Paper)

Improved Vacuum System Throughput, Inertness, and Corrosion Resistance

Webinars

Introducing Siltride: A SilcoTek Webinar Event

CVD Coatings for State of the Art Semiconductor Fabrication

A SilcoTek Webinar: CVD Coatings for Semiconductor Fabrication

Application Guides

Preventing Corrosion and Contamination in Samsung Scrubbers Systems with Siltride

Silicon Coatings for Semiconductor and Electronics Manufacturing

Improving The Reliability of Analytical And Sampling Systems in Corrosive Environments

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