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Dursox Coating, The Secret Behind Improved Semiconductor Yield

Published on May 29 2015

showerhead_2_19_15

 

Semiconductor manufacturers have found a new weapon in the struggle for improved yields, higher purity, and reduced cost.  Corrosives commonly used in semiconductor manufacturing cause yield robbing ion contamination; resulting in wafer contamination, higher maintenance and increased burn-in time. 

Dursox™ is a thin but durable silicon oxide (SiO) high purity barrier coating that prevents semiconductor tool corrosion and erosion. Dursox is bonded to stainless steel and ceramic surfaces by our patented CVD process.  The micro-thin coating penetrates small holes, inner cavities, and narrow bore tubes without significant change in tolerance. 

Watch our corrosion video and see how our coatings prevent corrosive attack.

 

 

Dursox can be applied to common tool components:

 

  • Showerheads
  • Supply tubes
  • Fittings
  • Regulators
  • Reactors

 

Dursox™­ offers significant resistance to corrosives.

 

Dursox_corrosion_comparison_5_28_15

 

Dursox™ is a high purity silicon oxide layer that contains no metals, assuring no leaching of metal ions into process streams; making it an ideal semiconductor coating.  XPS data show Dursox contains no metals throughout the layer.

 

DursoxXPSDataDursox™ is made for next generation semiconductor manufacturing systems.

  • Etch:
    • Dursox high purity coating eliminates ion contamination in corrosive etch gas streams
  • Atomic Layer Deposition (ALD):
    • Dursox enhances purity by coating of all chambers and equipment. Reduces carryover and corrosion
  • Epitaxy:
    • Dursox significantly reduces contamination and maintenance caused by corrosion
  • Ozone:
    • Stabilize flow path to assure ozone purity
  • Gas Transfer:
    • Prevent ion contamination, assure high purity gases
  • Chemical-Mechanical Planarization (CMP):
    • Increase lubricity, prevent sticking and cut downtime

Download Semicon  Application Note

Posted by Marty Higgins

Topics: Semiconductor, Purity, Corrosion

Recommended Reading

Exciting Developments in Silicon Barrier Coatings for Semicon

Semiconductor Tool Corrosion? New Dursox Coating Solves Your Problem!

How New Dursox changes the game in high purity corrosion resistance

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